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Bulk Ceramics and MEMs

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MT12100

 
The MTI2100 with the 2032RX module has a diameter of 300 microns and must be within 1 millimeter of the sample surface. The tip size of the MTI2100 makes it best suited for measuring bulk ceramics and larger piezoMEMs.  The 2032R sensor module for the MTI2100 operates the same as the 2032RX but with 40 times less resolution. It is suitable for measuring bulk ceramics that move 0.5 microns or more during actuation. It has a minimum single-pass resolution of 0.019_ on the Premier II and 0.0228_ on the LC. This resolution gives a signal-to-noise ratio of 50:1 for a 1_ displacement. For smaller displacements of 0.5_ or less,clean signals can be achieved using averaging. Vision provides averaging tools in its Task Library.
 
HVDM Test Fixture
 
Application Notes
     PZT-Silicon Cantilver Bender with MTI2100
     Large Signal Displacement with MRI2100
 
Hook up Instructions
 

Laser Vibrometer (SIOS)

 
The SIOS laser vibrometer has a much smaller spot size than the MTI2100 and a working distance of centimeters, making it easier to align with the sample. It also has a very high frequency response so it can be used at the 1kHz to 100 Hz frequency range. With its scale factor and small spot size, the SIOS vibrometer is suitable for measuring the displacements of piezoMEMs. However, it does not have the resolution to measure piston motion of thin ferroelectric film capacitors.
 
Application Note/Hook-up Instructions
 

Piezo Test

 

Using the versatility of Vision, Radiant has now created a task for the Vision Library that will control a Piezotest  PM100, PM200, or PM300 system for measuring the direct d33 and d31 coefficients for bulk ceramic materials.  The Piezotest systems are controlled via RS232 communications.  With a Piezotest system connected to the host computer, Vision will automatically open and program the RS232 channel to communicate with the Piezotest instrument remotely.

The Piezotest PM300 system will measure

d33

d31 and d15 using adaptors

Capacitance and tan d @ 1 kHz

The acoustic frequency range for d33 is 30 Hz to 300 Hz.
  • The static load is fixed at 10 Newtons
  • The oscillatory force range is 0.05 N to 0.5 N
  • The acoustic frequency and acoustic force are programmable remotely.

The PM100 and PM200 do not measure the capacitance or tan d parameters.  

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