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Piston/Thin Film Piezoelectric Measurements

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Piston/Thin Film Piezoelectric Measurements

 
The growing efforts worldwide to build and understand piezoelectric MEMs devices is encouraging Radiant's customers to examine the capabilities of our test equipment with commercial high-resolution displacement sensors to see their samples move. AFM' and Vibrometer's will work easily with Radiant's.  The ability to use external sensors has been integral to the Radiant Technologies tester architecture since the introduction of the RT6000 in 1993.
 

Polytec OFV-534

 
 
The OFV-534 provides a spot size as small as 1.5_ and a video camera with a microscope lens aligned with the laser interferometer beam. Consequently, the OFV-534 can be easily aligned on integrated scale piezoMEMs components having micron dimensions. The OFV-534 also has the scale factor to capture piston displacement of the capacitor surface. The Polytec sensor is suitable for direct study of the piezoelectric displacement of thin ferroelectric film capacitors while also being able to capture the much larger displacements of piezoMEMs actuators.
 
 

AFM's

 
 
AFMs are the most sensitive displacement sensors of all with submicron “spot” sizes. They can theoretically measure displacements down to small fractions of an Angstroms confined to areas with nanometer dimensions.
 
The Atomic Force Microscope uses a small cantilever with an approximately 20 nm diameter tip as its sensor probe. The usual operation of the AFM is to measure surface topology with sub-angstrom level resolution by placing the tip close to or in contact with the sample surface and monitoring the displacement of the cantilever caused by the surface as the tip is scanned across it. The control system actuates a bulk piezoelectric actuator attached to the cantilever in order to hold the cantilever at the same height above, or with the same contact force against, the sample surface.
 

Seiko AFM

 
 

Aslyum AFM

 
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