Thin ferroelectric films offer exciting opportunities to animate traditional MEMs devices. They can create actuators to enable movement, sensors for detecting movement, or sensors for seeing heat. This is not a new idea. But the fabrication of thin ferroelectric capacitors is itself a process as complex as those used for fabricating MEMs.

Radiant Technologies has been creating thin ferroelectric capacitors since 1990 in order to understand the physics of these unique devices. It now has in place a very capable process flow for manufacturing integrated ferroelectric components on silicon wafers and other substrates.

If you are considering the fabrication of any type of MEMs element that includes ferroelectric capacitors, let Radiant build the capacitors for you on your MEMs substrates. You will save time and money. Radiant’s capacitors have demonstrated d33 values close to 1000pC/N with excellent yield and electrical reliability characteristics. Please contact Radiant Technologies for more information on the design rules and capacitor characteristics.

Radiant makes supplies for researchers:

Platinized wafers
PZT coated wafers
Electrode deposition and patterning
Testing
Integrated ferroelectric capacitors
Dicing

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