Several compositions to choose from of sol-gel PZT ranging from 600Å to 1.8µ in thickness:
20/80 PZT from 600Å to 3000Å
4% niobium doped 20/80 PZT from 600Å to 1.8µ
9/65/35 PLZT up to 2500Å
15/0/100 PLT up to 1200Å
52/48 PZT from 3000Å to 1µ (A 300Å PLT seed layer will be under the PZT)
The PZT composition may be placed on the wafer with or without a bottom electrode of platinum. If there is no bottom electrode, the thin stack of titanium dixoide and 10/0/100 PLT will be placed below the PZT layer as a barrier. Platinum top and bottom electrodes, either global or patterned can be formed with the film. Chrome/Gold metal interconnect lines may be placed in contact with the electrodes.