technology is leaving the laboratory to become commercial PiezoMEMS. Much thicker bulk capacitors are being
embedded as actuators and sensors inside their own electronic circuitry. Multidisciplinary teams of mechanical,
electrical, and reliability engineers now work alongside materials engineers to
create new and novel devices. Classic
engineering tools such as impulse response, impedance analysis, and resonance characterization
must be integrated with traditional polarization, piezoelectric, pyroelectric,
and magnetoelectric measurements. To
control circuits containing embedded ferroic capacitors, asynchronous or
semi-synchronous digital and analog functions must run independent-of or in-parallel-with
crystal-clock-controlled ferroic measurements.
Communication with embedded controllers and custom digital circuitry is
critical. Together these requirements demand
an extremely complex test environment.
Technologies’ Precision PiezoMEMS Analyzer integrates digital, analog, and
communications circuit functions with the existing non-linear materials
measurement capabilities of the Precision Multiferroic Non-linear Materials
Tester, all supervised by Radiant’s Vision programmable test environment. The PiezoMEMS
Analyzer not only measures piezoelectric properties of actuator and sensor
elements of a commercial product, it will communicate with the product’s
electronic logic, talk to embedded microprocessors, supply asynchronous
voltages and pulses, and measure sensor frequencies. The pMEMS Analyzer combines the following
The Precision PiezoMEMS Analyzer is driven by Vision Software. Vision has four interconnected units:
of 155 measurement, analysis, plotting, program control, and documentation
to arrange multiple tasks together from the Library into a Test Definition.
Execution Engine to read and execute the Test Definition
amorphous database engine to Archive everything that happens in every Test
are 10 times cheaper to operate for simple measurements than are testers
manually or with scripts.
Radiant’s PiezoMEMS Analyzer running under the
Vision Materials RDP Operating System reduces Cost of Test by a factor greater
than 10 over any other ferroelectric tester
the only software package available for ferroelectric testers that provides
exceptional freedom to design, conduct and review all procedures associated
with any material experiment.
dramatically increases the productivity of the researcher, reducing the time
required to acquire data in an experiment.
Vision’s enhanced productivity directly reduces cost of test. Vision dramatically increases the complexity
of the research that may be accomplished by allowing researchers to combine
different measurement tasks with environmental controls into an automated test
procedure managed by programmable logic embedded with automated data
collection, analysis and plotting tools.
hardware functions of the piezoMEMS Analyzer are available as independent tasks
in Vision’s Library. By constructing
complex test definitions using combination of tasks in the Library, an engineer
1) Independently test specialized
non-linear components using non-linear materials.
build, and communicate with digital, analog, and microprocessor circuits
surrounding non-linear components.
portals in the circuit to allow direct electrical, piezoelectric, pyroelectric,
or magnetoelectric analysis of the non-linear while it remains embedded in the
single capability is the absolute necessity to understand and predict the
reliability of the embedded component and its surrounding circuit.
the performance of the combined circuit/non-linear component system.
the thermal, atmospheric, magnetic environment around the system from within a
test definition using ovens, cryogenic chambers, vibrating sample
magnetometers, or magnetic coils.
6) Qualify the short-term performance
limits and long-term reliability of the system under test.
Additional Hardware Specifications:
A fully functional, high speed,
non-linear ferroic properties tester ranging up to 200 volts capable of
Hysteresis, PUND, Leakage, CV, piezoelectric displacement, thermal, and
arbitrary analog pulse generator with programmable delay.
An asynchronous 16-bit, ±10V, 1012-ohm
input-impedance voltage measurement port.
Independent ±10V 25mA DC bias
60 MHz frequency counter for
measuring oscillator circuits.
[15 Out x 8 In/Out] parallel
digital port for setting, controlling, and reading digital ICs or communicating
Arbitrary I2C custom
programmable I/O for communicating with I2C capable microprocessors
and logic circuits.
Build in LCR impedance measurement port.
Frequency Range: 1 kHz to 100 kHz
Impedance Range: 100W up to 100 kW
Range +/-100V, +/-200V or ±500V
expandable to 10kV
- 16-bit Arbitrary Waveform Generator output
- 270KHz @ +/-100V and 100KHz @+/-200V built-in
- Accuracy 0.5% or Better
- Maximum Data Points 30,000
- Minimum Pulse Widths down to 0.5µs
Pulse Widths down to 1µs and up to 1s
controlled output ramp for maximum accuracy
- Polarization Measurement under AC & DC
- 18-bit Resolution (analog to digital
- 0.5µs capture rate with 0.1µs interlace
- Polarization, output voltage and SENSORs
- Minimum charge sensitivity -> 0.80fC
- Minimum PZT capacitor area -> 0.5u2
- Maximum Area Resolution 52.6mC
- Maximum Area Resolution >130cm2 w/o HVI
- Maximum hysteresis loop frequency
- Minimum hysteresis loop frequency -> 1/30th
Includes Vision Software
specifications in this document are preliminary and subject to change before